(Reuters) - Semiconductor equipment maker Lam Research said on Wednesday it had terminated a $10.6 billion deal to buy rival KLA-Tencor Corp.<div><a href="http://feeds.reuters.com/~ff/reuters/technologyNews?a=_dp_gTkEMjo:-fDwRWoNXRI:yIl2AUoC8zA"><img src="http://feeds.feedburner.com/~ff/reuters/technologyNews?d=yIl2AUoC8zA" border="0" /></a> <a href="http://feeds.reuters.com/~ff/reuters/technologyNews?a=_dp_gTkEMjo:-fDwRWoNXRI:V_sGLiPBpWU"><img src="http://feeds.feedburner.com/~ff/reuters/technologyNews?i=_dp_gTkEMjo:-fDwRWoNXRI:V_sGLiPBpWU" border="0" /></a> <a href="http://feeds.reuters.com/~ff/reuters/technologyNews?a=_dp_gTkEMjo:-fDwRWoNXRI:-BTjWOF_DHI"><img src="http://feeds.feedburner.com/~ff/reuters/technologyNews?i=_dp_gTkEMjo:-fDwRWoNXRI:-BTjWOF_DHI" border="0" /></a></div><img src="http://feeds.feedburner.com/~r/reuters/technologyNews/~4/_dp_gTkEMjo" height="1" width="1" alt="" />